The synthesis and evaluation of cyclic olefin sulfone copolymers and terpolymers as electron beam resists
- Edward Gipstein
- Wayne Moreau
- et al.
- 2003
- Journal of Applied Polymer Science
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.