Synthesis of compound thin films by dual ion beam deposition. II. Properties of aluminum-nitrogen films
- H.T.G. Hentzell
- J.M.E. Harper
- et al.
- 1985
- Journal of Applied Physics
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.