Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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509 results at JES

Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: I. Very Low Pressure Deposition
- - James H. Comfort
  - Rafael Reif
- 2019
- JES
The Ion Sensitivity of Boron Implanted Silicon Nitride Chemical Sensors
- - Yin Hu
  - Marvin H. White
- 2019
- JES
Hollow Cathode Etching of Si and SiO₂ Using CF₄ and H₂
- - G. Fortuño-Wiltshire
  - G.S. Oehrlein
- 2019
- JES
Jet and Laser-Jet Electrochemical Micromachining of Nickel and Steel
- - M. Datta
  - L. Romankiw
  - et al.
- 2019
- JES
Elimination of End-of-Range Shallow Junction Implantation Damage during CMOS Titanium Silicidation
- - G.A. Rozgonyi
- 2019
- JES
The Mechanism of Electroless Cu Deposition: Extraction of the Oxidative and Reductive Electrochemical Half-Cell Currents from a Complete Bath
- - O.R. Melroy
- 2019
- JES
Laser-Assisted Etching of Manganese-Zinc-Ferrite
- - Brian W. Hussey
  - Arunava Gupta
  - et al.
- 2019
- JES
Pitting of Sputtered Aluminum Alloy Thin Films
- - G.S. Frankel
  - Michael A. Russak
  - et al.
- 2019
- JES
Vapor Phase Deposition of Palladium for Electroless Copper Plating
- - Richard R. Thomas
  - Jae M. Park
- 2019
- JES
Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: II. Plasma Enhanced Deposition
- - James H. Comfort
  - Rafael Reif
- 2019
- JES