Surface analysis of realistic semiconductor microstructures
- Gottlieb S. Oehrlein
- Kevin K. Chan
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A comparison between aluminum and copper interactions with high-temperature oxide and nitride diffusion barriers
- A. Charai
- S.E. Harnstram
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Deposition and redeposition in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxidation of a cobalt chromium alloy: An x-ray photoemission spectroscopy study
- David E. Fowler
- Juergen Rogozik
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Theoretical scanning tunneling microscopy and atomic force microscopy study of graphite including tip-surface interaction
- Inder P. Batra
- S. Ciraci
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Coadsorbate induced ordering on Rh(111) and Rh(100) surfaces: Structural and chemical effects
- C.-T. Kao
- C.M. Mate
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: The barrier to oxygen penetration on transition-metal oxide surfaces
- Peter Nordlander
- Maria Ronay
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma studies on the Leybold-Heraeus INA3 secondary neutral mass spectrometry system
- A. Wucher
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Proposal for a novel gravitational-wave sensor
- M. Niksch
- G. Binnig
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Growth of epitaxial CaSi2 films on Si(111)
- J.F. Morar
- M. Wittmer
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films