Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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509 results at JES

A Study of Luminescent Centers in Reactive-Ion-Etched Silicon
- - T.D. Bestwick
  - G.S. Oehrlein
  - et al.
- 2019
- JES
Copper Corrosion with and without Inhibitors
- - V. Brusic
  - M.A. Frisch
  - et al.
- 2019
- JES
Removal of Fluorocarbon Residues on CF₄/H₂ Reactive-ion-Etched Silicon Surfaces Using a Hydrogen Plasma
- - J. Simko
  - G.S. Oehrlein
  - et al.
- 2019
- JES
Epitaxial Growth of GaAs with (C₂H₅)₂GaCl and AsH₃ in a Hotwall Reactor
- - T.F. Kuech
  - M.A. Tischler
  - et al.
- 2019
- JES
Growth of Facet-Free Selective Silicon Epitaxy at Low Temperature and Atmospheric Pressure
- - T.O. Sedgwick
  - P. Agnello
  - et al.
- 2019
- JES
Electro-oxidation of some soluble alkyl and aryl substituted polysilane homopolymers
- - A. Diaz
  - M. Baier
  - et al.
- 2019
- JES
Energy Considerations in the Deposition of High-Quality Plasma-Enhanced CVD Silicon Dioxide
- - E. Tierney
  - J. Batey
  - et al.
- 2019
- JES
Critical angles for channeling of boron ions implanted into single-crystal silicon
- - Chanahae Park
  - Kevin M. Klein
  - et al.
- 2019
- JES
Computer Simulation of Oxygen Segregation in CZ/MCZ Silicon Crystals and Comparison with Experimental Results
- - W.E. Langlois
- 2019
- JES
Selective dry etching of germanium with respect to silicon and vice versa
- - G.S. Oehrlein
  - T.D. Bestwick
  - et al.
- 2019
- JES