Electrical Properties of Chemical-Mechanical Polished Tetraethyl Orthosilicate Films with and Without Capping Layers
- S. Cohen
- M.A. Jaso
- et al.
- 2019
- JES
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
509 results at JES
Reactive Ion Etching of Silicon Nitride Deposited by Different Methods in CF4/H2 Plasmas
- W.A. Lanford
- 2019
- JES
A Self-Aligned, Trilayer, A-Si:H Thin Film Transistor Prepared from Two Photomasks
- Yue Kuo
- 2019
- JES
Principal Component Analysis of Optical Emission Spectroscopy and Mass Spectrometry: Application to Reactive Ion Etch Process Parameter Estimation Using Neural Networks
- Reza Shadmehr
- David Angell
- et al.
- 2019
- JES
X-Ray Absorption Study of Electrochemically Grown Oxide Films on Al-Cr Sputtered Alloys: I. Ex situ Studies
- A.J. Davenport
- H.S. Isaacs
- et al.
- 2019
- JES
Correlation of Surface Wettability and Corrosion Rate for Benzotriazole-Treated Copper
- Richard R. Thomas
- Vlasta A. Brusic
- et al.
- 2019
- JES
Chemical Surface-Modification of a Polyimide: Characterization and a Kinetic Study on the Diffusion of Ions in a Modified Polymer
- Miro M. Plechaty
- Richard R. Thomas
- 2019
- JES
Paramagnetic Point Defects in Amorphous Silicon Dioxide and Amorphous Silicon Nitride Thin Films: II. a-SiNx:H
- F.C. Rong
- E.H. Poindexter
- 2019
- JES
Design principles of bipolar electrochemical co-electrolysis cells for efficient reduction of carbon dioxide from gas phase at low temperature
- Alexandra Patru
- Tobias Binninger
- et al.
- 2019
- JES
Differential inhibition during Cu electrodeposition on Ru: Combined electrochemical and real-time TEM studies
- P. M. Vereecken
- Alex Radisic
- et al.
- 2018
- JES