Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Promotion of dissociative chemisorption with vibrational and translational energy
- - C.T. Rettner
  - H.E. Pfnür
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of the surface oxidation and magnetic properties of MnFe thin films
- - S.L. Cohen
  - Michael A. Russak
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Imaging oxygen acceptor states on the GaAs(110) surface
- - Joseph A. Stroscio
  - R.M. Feenstra
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray photoemission spectroscopy characterization of silicon surfaces after CF₄/H₂magnetron ion etching: Comparisons to reactive ion etching
- - Gottlieb S. Oehrlein
  - Arthur A. Bright
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A time resolved study of velocity distributions in pulsed molecular beams
- - Benjamin N. Eldridge
  - Ming L. Yu
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Transient fluorocarbon film thickness effects near the silicon dioxide/silicon interface in selective silicon dioxide reactive ion etching
- - Mark A. Jaso
  - Gottlieb S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Structure analysis of the GaAs(110) surface by scanning tunneling microscopy
- - J. Tersoff
  - R.M. Feenstra
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Tungsten-rhenium alloys as diffusion barriers between aluminum and silicon
- - S.-E. Hörnström
  - T. Lin
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Phenomena produced by ion bombardment in plasma-assisted etching environments
- - Harold F. Winters
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Multilayer thin films for x-ray optics
- - Eberhard Spiller
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films