Resolution, Overlay, and Field Size for Lithography Systems
- Alec N. Broers
- 1981
- IEEE T-ED
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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465 results at IEEE T-ED
The Effect of Concrete Shielding on Cosmic Ray Induced Soft Fails in Electronic Systems
- James F. Ziegler
- 1981
- IEEE T-ED
Mesostructure Electronics
- Peter J. Price
- 1981
- IEEE T-ED
The Effect of Base Doping on the Performance of Si Bipolar Transistors at Low Temperatures
- William P. Dumke
- 1981
- IEEE T-ED
Importance of Boundary Conditions to Conduction in Short Samples
- James J. Rosenberg
- Ellen J. Yoffa
- et al.
- 1981
- IEEE T-ED
I-2 Shallow Silicide Contact for Shallow Junction Devices
- K.N. Tu
- 1981
- IEEE T-ED
Josephson Edge-Junction Devices Using E-Beam Lithography
- Peter Vettiger
- David F. Moore
- et al.
- 1981
- IEEE T-ED
Device Characterization of an Electron-Beam-Switched Thin-Film ZnS:Mn Electroluminescent Faceplate
- Omesh Sahni
- Paul M. Alt
- et al.
- 1981
- IEEE T-ED
Resolution and Linewidth Tolerances in Electron Beam and Optical Projection Lithography
- Tung Symon Chang
- David F. Kyser
- et al.
- 1981
- IEEE T-ED
TA-A2 Electrically Alterable Read-only Memory Using Si Rich SiO2 Injectors and a Floating Polycrystalline Silicon Storage Layer
- D.J. DiMaria
- K.M. DeMeyer
- et al.
- 1980
- IEEE T-ED