Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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509 results at JES

Parametric study of NiFe and NiFeCo high density plasma etching using CO/NH₃
- - K.B. Jung
  - J. Hong
  - et al.
- 1999
- JES
Comparison of Cl₂/He, Cl₂/Ar, and Cl₂/Xe plasma chemistries for dry etching of NiFe and NiFeCo
- - K.B. Jung
  - H. Cho
  - et al.
- 1999
- JES
Stress-Corrosion Cracking of Low-Dielectric-Constant Spin-On-Glass Thin Films
- - Robert F. Cook
  - Eric G. Liniger
- 1999
- JES
The thermal stability of CoSi₂ on polycrystalline silicon: The effect of silicon grain size and metal thickness
- - J.P. Gambino
  - E.G. Colgan
  - et al.
- 1998
- JES
Boron in polycrystalline Si_xGe_1-x films: Phase diagram and solid solubility
- - D. Mangelinck
  - P.-E. Hellberg
  - et al.
- 1998
- JES
Surface finishing of high speed print bands: I. A prototype tool for electrochemical microfinishing and character rounding of print bands
- - M. Datta
  - J.C. Andreshak
  - et al.
- 1998
- JES
Novel low k dielectrics based on diamondlike carbon materials
- - A. Grill
  - V.V. Patel
  - et al.
- 1998
- JES
Surface finishing of high speed print bands: II. An electrochemical process for microfinishing of hardened Fe-13Cr stainless steel
- - M. Datta
  - L. Romankiw
- 1998
- JES
Effect of benzotriazole on the anisotropic electrolytic etching of copper
- - Demetrius Papapanoyiotou
  - Hariklia Deligianni
  - et al.
- 1998
- JES
High temperature reactive ion etching of indium-tin oxide with HBr and CH₄ mixtures
- - Yue Kuo
  - T.L. Tai
- 1998
- JES