XeCl laser controlled chemical etching of aluminum in chlorine gas
- G. Koren
- Fahfu Ho
- et al.
- 1986
- Applied Physics A Solids and Surfaces
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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50 results at Applied Physics A Solids and Surfaces
Laser irradiation of chemisorbed oxygen on Si(111): Electronic states and clump formation of SiO2
- A.J. Schell-Sorokin
- J.E. Demuth
- 1986
- Applied Physics A Solids and Surfaces
Thermal diffusivity measurements of thin films with a pyroelectric calorimeter
- H. Coufal
- P. Hefferle
- 1985
- Applied Physics A Solids and Surfaces
Electronic structure of semiconductor surfaces
- F.J. Himpsel
- 1985
- Applied Physics A Solids and Surfaces
Point defects, diffusion processes, and swirl defect formation in silicon
- T.Y. Tan
- U. Gösele
- 1985
- Applied Physics A Solids and Surfaces
Photo-enhanced etching of n-Si
- H.J. Hoffmann
- J. Woodall
- 1984
- Applied Physics A Solids and Surfaces
Direct high-resolution excimer laser photoetching
- S. Rice
- K. Jain
- 1984
- Applied Physics A Solids and Surfaces
On the nature of point defects and the effect of oxidation on substitutional dopant diffusion in silicon
- T.Y. Tan
- U. Gösele
- et al.
- 1983
- Applied Physics A Solids and Surfaces
Oxygen diffusion and thermal donor formation in silicon
- U. Gösele
- T.Y. Tan
- 1982
- Applied Physics A Solids and Surfaces
The high-power sliding-spark capillary discharge in vacuum: Variations and applications
- R.A. McCorkle
- 1981
- Applied Physics A Solids and Surfaces