Improving FinFET Junctions and Contacts via Laser Annealing
- Oleg Gluschenkov
- Yasir Sulehria
- et al.
- 2023
- IWJT 2023
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.