Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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1 result at International Conference on Microprocesses and Nanotechnology 2001

Fluoropolymer platforms for 157 nm resist applications
- - Hiroshi Ito
  - G.M. Wallraff
  - et al.
- 2001
- International Conference on Microprocesses and Nanotechnology 2001