Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results at Microlithography 1997

Conducting polyaniline coatings for submicron lithography and SEM metrology
- - Teresita Graham
  - Marie Angelopoulos
  - et al.
- 1997
- Microlithography 1997
Evaluation of the defense advanced lithography program (DALP) X-ray lithography aligner
- - A.C. Chen
  - A. Flamholz
  - et al.
- 1997
- Microlithography 1997
A method to improve setup and overlay performance on an excimer laser stepper using a unique DUV resist-KRS
- - Karen Petrillo
  - James Brancaccio
  - et al.
- 1997
- Microlithography 1997
Simulation of X-ray mask defect printability
- - B.S. Bollepalli
  - Scott D. Hector
  - et al.
- 1997
- Microlithography 1997