Focussed excimer laser beams: A technique for selective micropatterning
- Jean M. Hagerhorst
- Modest M. Oprysko
- 1988
- SPIE OE/LASE 1988
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This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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3 results at SPIE OE/LASE 1988
Electrical Considerations for Interconnections Inside a Computer
- G. Arjavalingam
- Barry J. Rubin
- 1988
- SPIE OE/LASE 1988
Thermal and photo thermal imaging on a sub 100 nanometer scale
- C.C. Williams
- H.K. Wickramasinghe
- 1988
- SPIE OE/LASE 1988