Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results at IITC 2013

CVD-Co/Cu(Mn) integration and reliability for 10 nm node
- - Takeshi Nogami
  - M. He
  - et al.
- 2013
- IITC 2013
Subtractive W contact and local interconnect co-integration (CLIC)
- - Fei Liu
  - Benjamin Fletcher
  - et al.
- 2013
- IITC 2013
UV cure impact on robust low-k with sub-nm pores and high carbon content for high performance Cu/low-k BEOL modules
- - N. Inoue
  - F. Ito
  - et al.
- 2013
- IITC 2013