Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results at Journal of the Korean Physical Society

Plasma modeling of a PEALD system for the deposition of TiO ₂ and HfO ₂
- - Junghoon Joo
  - Steve M. Rossnagel
- 2009
- Journal of the Korean Physical Society
Generation of 193-nm femtosecond light pulses and their application to photomask repair
- - D. Lim
  - R. Haight
- 2007
- Journal of the Korean Physical Society
Admittance spectroscopy of Mg-doped GaN grown by molecular beam epitaxy using RF nitrogen sources
- - D.J. Kim
  - D.Y. Ryu
  - et al.
- 1999
- Journal of the Korean Physical Society