Integrated multilayer high aspect ratio milliactuators
- L.-S. Fan
- S.J. Woodman
- et al.
- 1995
- Sensors and Actuators: A. Physical
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This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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2 results at Sensors and Actuators: A. Physical
Tip-based data storage using micromechanical cantilevers
- H.J. Mamin
- L.-S. Fan
- et al.
- 1995
- Sensors and Actuators: A. Physical