PublicationThin Solid FilmsPaperA computer calculation of step coverage in SiO thin filmsThin Solid FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate12 Mar 1982PublicationThin Solid FilmsAuthorsG.R. ProtoI.A. BlechP.D. HohIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
