High speed maskless patterning by electrolytic jet

Abstract

A free standing electrolytic jet has been used to investigate high speed maskless micromachining of metals and alloys. The apparatus consists of a fine nozzle, 50-175 μm in diameter, through which a jet of electrolyte is directed toward a sample to be etched while a voltage is applied between the nozzle (cathode) and the sample (anode). A concentrated neutral salt (NaNO3 or NaCl) solution is used as the electrolyte. The appratus has been used for electroetching of blind holes and lines as well as through holes and lines. The results of the present study demonstrate that an electrolytic jet can be employed for high speed maskless patterning of different metals and alloys.