Chemistry of hexamethylcyclotrisilazane (HMCTS) silylation
- K.J. Stewart
- J.M. Shaw
- et al.
- 1989
- Symposium on Patterning Science and Technology 1989
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2 results at Symposium on Patterning Science and Technology 1989
High speed maskless patterning by electrolytic jet
- C. Clerc
- M. Datta
- et al.
- 1989
- Symposium on Patterning Science and Technology 1989