PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperInteraction of Ti with fused silica and sapphire during metallizationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jul 1987PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsY.S. ChaugN.J. ChouY.H. KimIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare