Local structure investigation of the ion sputtered oxide substrates
- Y.S. Chaug
- Y.H. Kim
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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5 results for Y.S. Chaug
X-ray photoelectron and infrared spectroscopy of microwave plasma etched polyimide surfaces
- N.J. Chou
- J. Paraszczak
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Interaction of Ti with fused silica and sapphire during metallization
- Y.S. Chaug
- N.J. Chou
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion of titanium thin film to oxide substrates
- Y.H. Kim
- Y.S. Chaug
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mechanism of microwave plasma etching of polyimides in O2 and CF4 gas mixtures
- N.J. Chou
- J. Parazsczak
- et al.
- 1986
- Microelectronic Engineering