Publication
Symposium on Plasma Processing 1986
Conference paper
RADIAL DISTRIBUTION OF OXYGEN MOLECULAR IONS IN DIODE REACTOR.
Abstract
Radial distribution of the O//2** plus ions has been measured by optical emission spectroscopy. At a low pressure, the radial profile of O//2** plus tends to have a convex shape, i. e. , its maximum at the center of a cathode, due to a loss of electrons to the grounded sidewall. As pressure increases, the radial profile becomes uniform and then reverses to a concave shape, i. e. , its maximum at the edge of a cathode, due to the presence of grounded cathode shield. Also, axial magnetic field parallel to the cathode normal can stir the electron trajectories, consequently enhancing the ion density near the cathode edge.