PublicationJVSTAPaperSummary Abstract: The origin of oxidation induced enhancement of Si+ sputter yield in SIMSJVSTAView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1985PublicationJVSTAAuthorsD.J. VitkavageJ.G. ClabesD.J. VitkavageIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare