Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for D.J. Vitkavage

Doping reaction of PH₃ and B₂H₆ with Si(100)
- - Ming L. Yu
  - D.J. Vitkavage
  - et al.
- 1986
- Journal of Applied Physics
Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si
- - M.L. Yu
  - D.J. Vitkavage
  - et al.
- 1985
- JVSTA
Summary Abstract: The origin of oxidation induced enhancement of Si⁺ sputter yield in SIMS
- - D.J. Vitkavage
  - J.G. Clabes
  - et al.
- 1985
- JVSTA