Plasma-Enhanced Photoemission Detection: A New Method for Real-Time Surface Monitoring During Plasma Processing
- J. Singh
- 1989
- IEEE JQE
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
25 results for G.S. Selwyn
LASER SPECTROSCOPY IN ELECTRONIC MATERIALS PROCESSING RESEARCH.
- R.W. Dreyfus
- J.M. Jasinski
- et al.
- 1986
- Laser Focus (Littleton, Massachusetts)
Spatially resolved optical emission studies of fluorocarbon RF plasma through the use of UV-transmitting optical fibers
- G.S. Selwyn
- E. Kay
- 1985
- Plasma Chemistry and Plasma Processing
Studies of atomic oxygen in O2+CF4 rf discharges by two-photon laser-induced fluorescence and optical emission spectroscopy
- R.E. Walkup
- K.L. Saenger
- et al.
- 1985
- The Journal of Chemical Physics
Laser detection of diatomic products of plasma sputtering and etching
- R.E. Walkup
- Ph. Avouris
- et al.
- 1984
- Applied Physics Letters