Fabrication of phase shifting masks employing multi-layer films
- T.C. Chicu
- K.K. Shih
- et al.
- 1994
- Microlithography 1994
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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15 results for K.K. Shih
Thermal transfer printing with heat amplification
- Ari Aviram
- Kwang K. Shih
- et al.
- 1991
- IS&T/SPIE Electronic Imaging 1991
Deposition of aluminum oxide films with high refractive index
- K.K. Shih
- D.B. Dove
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Properties of Co-N, Co-Fe-N, and Co-Zr-N films prepared by rf sputtering in nitrogen-argon gas mixtures
- K.K. Shih
- J. Karasinski
- 1993
- Journal of Applied Physics
Ti/Ti-N Hf/Hf-N and W/W-N multilayer films with high mechanical hardness
- K.K. Shih
- D.B. Dove
- 1992
- Applied Physics Letters
Properties of NiFe-N films prepared by rf sputtering in nitrogen-argon gas mixtures
- K.K. Shih
- M.E. Re
- et al.
- 1992
- Journal of Applied Physics
Thermal transfer printing with heat amplification
- A. Aviram
- K.K. Shih
- et al.
- 1991
- Journal of imaging technology
Structure and orientation of films prepared by reactive sputtering of Ni, Fe, and NiFe in Ar/N2 mixtures
- T. Takamori
- K.K. Shih
- et al.
- 1990
- Journal of Applied Physics
Fe/Fe-N multilayer films with low coercivity zero magnetostriction and high saturation magnetization
- K.K. Shih
- M.E. Re
- et al.
- 1990
- Applied Physics Letters
Properties of W-N and Mo-N films prepared by reactive sputtering
- K.K. Shih
- D.B. Dove
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films