The effect of plasma chemistry on the damage induced to porous SiCOH dielectrics
- A. Grill
- V.V. Patel
- 2006
- JES
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50 results for V.V. Patel
Hydrogen plasma effects on ultralow-k porous SiCOH dielectrics
- A. Grill
- V. Sternhagen
- et al.
- 2005
- Journal of Applied Physics
Interaction of hydrogen plasma with extreme low-k SiCOH dielectrics
- A. Grill
- V.V. Patel
- 2004
- JES
Porosity in plasma enhanced chemical vapor deposited SiCoH dielectrics: A comparative study
- A. Grill
- V.V. Patel
- et al.
- 2003
- Journal of Applied Physics
Static frequency divider circuit using 0.15 μm gate length Si0.2Ge0.8/Si0.7Ge0.3 p-MODFETs
- D. Singh
- S.J. Koester
- et al.
- 2003
- Electronics Letters
Effects of precursor additives on the stability of plasma enhanced chemical vapor deposited a-GeC(O):H films
- A. Grill
- S. Guilley
- et al.
- 2002
- Journal of Materials Research
Tunable anti-reflective coatings with built-in hard mask properties facilitating thin resist processing
- Arpan P. Mahorowala
- Katherina Babich
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition
- A. Grill
- V.V. Patel
- 2001
- Applied Physics Letters
Tribological and mechanical properties of diamond-like carbon prepared by high-density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2001
- Diamond and Related Materials
Diamond-like carbon prepared by high density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2000
- Diamond and Related Materials