Silicon Oxidation Studies: Analysis of SiO2 Film Growth Data
- E.A. Irene
- Y.J. van der Meulen
- 2019
- JES
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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32 results for E.A. Irene
Silicon Oxidation Studies: The Role of H2O
- E.A. Irene
- R. Ghez
- 2019
- JES
Silicon Oxidation Studies: Some Aspects of the Initial Oxidation Regime
- E.A. Irene
- 2019
- JES
Silicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal Silicon
- E.A. Irene
- D.W. Dong
- 2019
- JES
Preparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 Films
- D.W. Dong
- E.A. Irene
- et al.
- 2019
- JES
Selective Studies of Chemical Vapor-Deposited Aluminum Nitride-Silicon Nitride Mixture Films
- S. Zirinsky
- E.A. Irene
- 2019
- JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- E.A. Irene
- N.J. Chou
- et al.
- 2019
- JES
Silicon Oxidation Studies: Morphological Aspects of the Oxidation of Polycrystalline Silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES
Residual Stress, Chemical Etch Rate, Refractive Index, and Density Measurements on SiO2 Films Prepared Using High Pressure Oxygen
- E.A. Irene
- D.W. Dong
- et al.
- 2019
- JES
An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- E.A. Irene
- E. Tierney
- et al.
- 2019
- JES