EXCIMER LASER PROJECTION LITHOGRAPHY ON A FULL-FIELD SCANNING PROJECTION SYSTEM.
- R.T. Kerth
- K. Jain
- et al.
- 1986
- IEEE Electron Device Letters
Publications
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23 results for K. Jain
Ultrafast Deep UV Lithography with Excimer Lasers
- K. Jain
- B.J. Lin
- 1982
- IEEE Electron Device Letters
ORGANIC MATERIALS FOR OPTICAL SECOND HARMONIC GENERATION.
- R.J. Twieg
- K. Jain
- 1982
- ACS National Meeting 1982
Highly efficient shg and povrder phase matching properties of benzene and pyridine derivatives
- Alain Azema
- Robert Twieg
- et al.
- 1989
- Proceedings of SPIE 1989
Organic materials for nonlinear optics; new efficient derivatives of nitrobenzene and nitropyridine
- R.J. Twieg
- K. Jain
- et al.
- 1983
- CLEO 1983
Ultrafast high resolution contact lithography using excimer lasers
- K. Jain
- B.J. Lin
- 1989
- Proceedings of SPIE 1989
Ultrafast deep UV lithography using excimer lasers
- K. Jain
- S. Rice
- et al.
- 2004
- Polymer Engineering & Science
Beam intensity uniformization by mirror folding
- M.R. Latta
- K. Jain
- 1984
- Optics Communications
Direct high-resolution excimer laser photoetching
- S. Rice
- K. Jain
- 1984
- Applied Physics A Solids and Surfaces
Excimer laser projection lithography
- K. Jain
- R.T. Kerth
- 1984
- Applied Optics