SILICIDE FOR CONTACTS AND INTERCONNECTS.
- C.-Y. Ting
- 1983
- IEDM 1983
Publications
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34 results for C.-Y. Ting
USE OF TiSi//2 FOR SELF ALIGNED SILICIDE (SALICIDE) TECHNOLOGY.
- C.-Y. Ting
- Subramanian S. Iyer
- 1984
- VMIC 1984
MICROSTRUCTURE STUDIES OF Al-Cu SUBMICRON INTERCONNECTION.
- T. Kwok
- C.-Y. Ting
- et al.
- 1984
- VMIC 1984
HIGH TEMPERATURE PROCESS LIMITATIONS ON TiSi//2.
- C.-Y. Ting
- F.M. d'Heurle
- et al.
- 1984
- ECS Meeting 1984
AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- Subramanian S. Iyer
- C.-Y. Ting
- et al.
- 1983
- VLSI Science and Technology 1983
INTERACTION BETWEEN Ti AND SiO//2.
- C.-Y. Ting
- M. Wittmer
- et al.
- 1983
- ECS Meeting 1983
INTERACTION BETWEEN Ti AND SiO//2.
- C.-Y. Ting
- M. Wittmer
- et al.
- 1983
- VLSI Science and Technology 1983
AMBIENT GAS EFFECTS ON THE REACTION OF TITANIUM WITH SILICON.
- Subramanian S. Iyer
- C.-Y. Ting
- et al.
- 1983
- ECS Meeting 1983
Controlled Collapse Reflow for Josephson Chip Bonding
- C.-Y. Ting
- K.R. Grebe
- et al.
- 2019
- JES
Electrical Properties of Al/Ti Contact Metallurgy for VLSI Application
- C.-Y. Ting
- B.L. Crowder
- 2019
- JES